Sales Manager: Mr. Peng
Tel: +86 136 0112 5769
E-mail:sales@technol.cn
2018-10-28 Onclick:
1. Ranges of vacuum division
Ranges of Vacuum | Pressure range | |
托(Torr) | 帕(Pa) | |
Low vacuum (LV) | 760~10 | 101325~1333 |
Medium vacuum(MV) | 10~10-3 | 1333~1.33×10-1 |
High vacuum(HV) | 10-3~10-8 | 1.33×10-1~10-6 |
Ultra high vacuum (UHV) | 10-8~10-12 | 10-6~10-10 |
Extreme high vacuum(XHV) | <10-12 | <10-10 |
2. Flow rate and leak rate
Pa·l/s | mbar·l/s | Torr·l/s | atm·cm3/s | sccm | |
1Pa·l/s | 1 | 10 | 7.5 | 9.87 | 59.2 |
1 mbar·l/s | 0.1 | 1 | 0.75 | 0.987 | 5.92 |
1 Torr·l/s | 0.133 | 1.33 | 1 | 1.32 | 78.9 |
1 atm·cm3/s | 0.101 | 1.01 | 0.76 | 1 | 60 |
1 sccm | 1.69×10-3 | 1.69×10-2 | 1.27×10-2 | 1.67×10-2 | 1 |
3. Pumping rate unit conversion table
Unit | 立方米/秒 | 升/秒(L/s) | 立方米/小时 | 立方英尺/分 |
1立方米/秒(1m3/s) | 1 | 1000 | 3600 | 2118.88 |
1升/秒(1L/s) | 10-3 | 1 | 3.6 | 2.119 |
1立方米/小时(1m3/h) | 2.78×10-4 | 0.278 | 1 | 0.59 |
1立方英尺/分(1cft/min) | 4.72×10-4 | 0.47 | 1.69 | 1 |
4. Common pressure unit conversion table
帕 | 托 | 微米汞柱 | 微巴 | 毫巴 | 大气压 | 工程大气压 | 英寸汞柱 | 磅/英寸2 | |
1 Pa | 1 | 7.5 | 7.5 | 10 | 10-2 | 9.86923 | 1.0197 | 2.953 | 1.450 |
1 Torr | 133.32 | 1 | 103 | 1333.2 | 1.3332 | 1.31579 | 1.3595 | 3.937 | 1.934 |
1 μmHg | 0.13332 | 10-3 | 1 | 1.3332 | 1.3332 | 1.31579 | 1.3595 | 3.937 | 1.934 |
1 μbar | 10-1 | 7.5 | 7.5 | 1 | 10-3 | 9.86923 | 1.0197 | 2.953 | 1.450 |
1 mbar | 102 | 7.5 | 7.5 | 103 | 1 | 9.86923 | 1.0197 | 2.953 | 1.450 |
1 atm | 101325 | 760 | 760×103 | 1013.25 | 1013.25 | 1 | 1.0333 | 29.921 | 14.696 |
1 am | 98066.3 | 735.56 | 735.56 | 980663 | 980663 | 0.967839 | 1 | 28.959 | 14.223 |
1 inHg | 3386 | 25.4 | 25.4×103 | 3.386×104 | 33.86 | 3.342 | 3.453 | 1 | 4.912 |
1 lb/in2 | 6895 | 51.715 | 51.715 | 6.895×104 | 68.95 | 6.805 | 7.031 | 2.086 | 1 |
5. 20 ℃ air under different pressure of molecular mean free path
P(托) | 1 | 10-3 | 10-4 | 10-5 | 10-6 | 10-9 |
λ(厘米) | 4.72×10-3 | 4.72 | 47.2 | 472 | 4720 | 4.72×106 |
6. Air molecular density at different pressures
P(托) | 1 | 10-3 | 10-4 | 10-5 | 10-6 | 10-9 |
n0(个/厘米3) | 4×1016 | 4×1013 | 4×1012 | 4×1011 | 4×1010 | 4×107 |
7. Various rubber properties table
Rubber type | Natural rubber | Butyl rubber | Nitrile rubber | Fluororubber |
Feature 1 | Water resistance, acid resistance, good alkali resistance | Low penetration rate | Good oil resistance | 23 Type strong acid resistance |
Feature2 | Large gas output | serious sublimation | Better elasticity | 26 Type Low permeability and low gas output rate |
Vacuum range | 1×10-5托 | 10-7托 | 10-8托 | 10-8托 |
Temperature | -30~80℃ | -30~150℃ | -30~120℃ | -20~200℃ |
8. Type of vacuum pump and scope of work
Vacuum pump | Working range(Torr) | Vacuum pump | Working range(Torr) |
Sliding-vane rotary vacuum pump | 760~5×10-4 | Piston vacuum pump | 760~10-2 |
Rotary plunger vacuum pump | 760~5×10-3 | Sorption pump | 760~10-4 |
Oil booster pump | 10-1~10-4 | Sputter ion pump | 10-4~10-10 |
Roots vacuum pump | 10-1~10-4 | Titanium sublimation pump | 10-3~10-10 |
Oil diffusion pump | 10-3~5×10-7 | Molecular pump | 10-3~10-10 |
Water-ring vacuum pump | 760~25 | Cryopump | 10-3~10-10 |